Best Poster Award
■ P-27
“Supercritical fluid deposition of conformal oxide films: 3-dimentionally-stacked RuO2/TiO2/RuO2 structures for MIM capacitors”
Yu Zhao
Yusuke Shimoyama
Takeshi Momose
Yukihiro Shimogaki
The University of Tokyo
Gold Sponsors
- Hitachi Kokusai Electric Inc.
- Lam Research Corporation
- SanDisk Limited
- SCIVAX Corporation
- Tokyo Ohka Kogyo Co., LTD.
- Toshiba Corporation, Storage & Device Solutions Company
Silver Sponsors
- Applied Materials, Inc.
- GLOBALFOUNDRIES
- Sony Semiconductor Solutions Corporation
- TOKYO ELECTRON LIMITED
Bronze Sponsors
- ASAHI KASEI MICRODEVICES CORPORATION
- NISSIN ION EQUIPMENT CO.,LTD.
- SCREEN Semiconductor Solutions Co., Ltd.
Exhibitors
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