| A novel technique for fabrication of linear arrays of high frequency piezoelectric Micromachined Ultrasound Transducers (pMUT) on silicon substrates is presented. Piezoelectric elements are formed by deposition of PZT into etched features of the silicon substrate such that the depth of these features determine the element thickness and hence the resonance frequency. The process leaves a near planar surface which is ideal for further wafer level processing such as top electrode and interconnect formation. A fabricated single element is characterized by pulse echo response. |