P3J091-01. Piezoelectrically Actuated Micromechanical BAW Resonators

We report on piezoelectrically actuated 13 MHz silicon beam resonators operating in the fundamental length extensional BAW mode. The resonance is evoked using an aluminum nitride layer grown on top of the resonator. We demonstrate quality factors as high as 55 000 in vacuum, and transduction factors η of the order of 20 µN/V. The anchor loss is studied using designs with variations in the support beam width and in the resonator orientation (crystalline direction).