P2G076-05. Fabrication of MEMS Diaphragm Transducer Array Based on Epitaxial PZT Thin Film for 2-D Hydrophone Application

A piezoelectric ultrasonic hydrophone array was fabricated using diaphragm transducer on Si substrates. A two dimensional (2-D) array of 8 x 8 elements with diaphragm transducer has been developed by XeF2 etching from the topside of Si. In this paper, we describe the fabrication process of the diaphragm transducer array. A finite-element analysis (FEA) was calculated to evaluate the resonant frequency of the diaphragm transducer. The potential for this hydrophone array are discussed.