6I-3. Theoretical Study of Acoustic Streaming Induced Cooling Effect in the Microscale

Heat transfer due to forced convection caused by acoustic streaming in microfluidic devices is shown to have potential in cooling effect. However, few studies are made for theoretically studying the fluid motion induced by the acoustic field and forced heat transfer for micro cooling in microdevices. In this paper, Navier-Stokes equations are first employed to study acoustic radiation force and acoustic streaming in microchannel actuated by ultrasonic vibration. Then, an analytical study of fluid motion acoustically induced and the temperature field in microchannel is investigated to determine the enhancement of cooling effect in microchannel with acoustic streaming.