| Piezoelectric Pb(Zr0.52Ti0.48)O3 thick film with the thickness around 10 µm has been deposited on the (111) Pt/Ti/SiO2/Si substrate using a ceramic power/sol-gel solution modified composite method. X-ray diffraction analysis and scanning electron microscope revealed that the film was in the well-crystallized perovskite phase and cracked free. At 1 KHz, The dielectric constant and the loss were 1925 and 0.015, respectively. The remnant polarization was 42.0µC/cm2 at room temperature. A high frequency single element acoustic transducer fabricated with this film showed a bandwidth at -6 dB of 50% at 156 MHz. |