P2N129-04. Single Phase Transducer Consisting of AlGaN/GaN Film

2 DEG has effective for realize functional device because it could be controlled by applied electric fields, but it has relatively poor conductive characteristics compared to the metal electrodes. In this paper, we have studied possibility of 2 DEG electrodes as the buried electrode for the single phase transducer, which would be suited for realizing high speed device. We have proposed new single phase transducers using 2 DEG electrode and experimentally verified its performance.