| This paper presents a model-based ultra-precision stage control that utilizes a contact-type non-resonant ultrasonic actuator. The linear actuator is the synchronous piezoelectric device driver (SPIDER), which has the strong non-linearity due to the friction drive mechanism. Therefore, the friction characteristics are at first experimentally evaluated. Next, focusing on the non-linear property of the friction, the control object is identified by the system identification strategy. Then, the model-based friction compensation and model predictive position control based on the identified model are performed. Two predictive control methods with the friction compensation are compared and evaluated through the positioning experiments. Moreover, the robustness of the designed predictive control system to load uncertainties is analyzed. |