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April 17, 2010

Mtg: MEMS-based Ultrasonic Transducers in Medical Imaging and Therapy

by @ 8:09 am. Filed under ALL, BioEngineering, Electronics Design, Optics/Displays, Semiconductors
 

WEDNESDAY April 21, 2010
SCV Engineering in Medicine and Biology Chapter
Speaker: B. (Pierre) T. Khuri-Yakub, Stanford University
Time: Optional dinner at Nexus Cafeteria in the Clark Center, 6:15 pm (no host, no reservations); Presentation at 7:30 PM
Cost: none
Place: Room M-114, Stanford University Medical School, Stanford
RSVP: not required
Web: www.ewh.ieee.org/r6/scv/embs

Capacitive Micromachined Ultrasonic Transducers (CMUTs) have been developed in the past decade as alternative transducers for generating and detecting ultrasound. Capacitor transducers have been known for over 100 years; however, the advent of silicon micromachining has enabled the realization of the full potential of these transducers. Silicon micromachining allows the manufacture of capacitors with very thin gaps that can withstand electric fields of the order of 109 V/m. These fields enable performance that makes CMUTs competitive and superior to piezoelectric transducers.
In immersion applications, CMUTs are possible with fractional bandwidth of over 100 %, an electromechanical coupling coefficient close to unity; are made in the form of single element or one-dimensional (1D) or two-dimensional (2D) arrays of tens of thousand of elements, as well as annular arrays. They have been operated in the frequency range of 100 kHz to 50 MHz, and included in systems with a dynamic range of the order of 150 dB/V/Hz. Custom electronics have been developed and integrated with arrays of transducers to form compact catheter based medical ultrasound imaging systems.
This presentation will first review the operation of CMUTs, the technology used to make them, transmit/receive RF electronics, and several applications in medical imaging and therapy.

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