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April 8, 2008

Mtg: Integrated On-Chip Inductors Using Magnetic Material

by @ 7:26 am. Filed under ALL, Communications, Computers/Software, Electronics Design, Semiconductors

SCV Magnetics Chapter
Speaker: Don Gardner, Intel Corporation
Time: Cookies & Conversation at 7:30 PM, Presentation at 8:00 PM
Cost: none
Place: Western Digital, 1710 Automation Parkway, San Jose
RSVP: not required


On-chip inductors with magnetic material are integrated into both advanced 130 nm and 90 nm CMOS processes. ? The inductors use copper metallization and amorphous CoZrTa magnetic material.? Increases in inductance of up to 28� were obtained, significantly greater than prior values for on-chip inductors. ? With such improvements, the effects of eddy currents, skin effect, and proximity effect become clearly visible at higher frequencies. The CoZrTa was chosen for its good combination of high permeability, good high-temperature stability (>250°C), high saturation magnetization, low magnetostriction, high resistivity, minimal hysteretic loss, and compatibility with silicon technology. ? The CoZrTa alloy can operate at frequencies up to 9.8 GHz, but tradeoffs exists between frequency, inductance, and quality factor. ? The effects of increasing the magnetic film thickness on the permeability spectra were measured and modeled. The inductors use magnetic vias and elongated structures to take advantage of the uniaxial magnetic anisotropy. ? Techniques are presented to extract and examine the effects of magnetic vias on the inductor structures. ? The inductors with thick copper and thicker magnetic films have inductance densities of up to 1.3 mH/mm2, resistances as low as 0.04 W, and quality factors of 8 at 50 MHz.


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