IEEE S.F. Bay Area Council e-GRID's
BayAreaTech

Technology & Networking in Silicon Valley & the SF Bay Area: Upcoming Meetings, Courses and Conferences

February 16, 2014

Mtg: Extreme Ultraviolet Photolithography

by @ 12:05 pm. Filed under ALL, NanoEngineering, Optics/Displays, Semiconductors
 

TUESDAY March 4, 2014
SCV Photonics Chapter
– density, feature size, power, transition plans …
Speaker: Mark Phillips, EUV lithography group, Intel
Time: Networking and Pizza at 6:00 PM, Presentation at 7:00 PM
Cost: none
Place: Intel Auditorium, Building SC-12, 3600 Juliette Lane, Santa Clara
RSVP: from website
Web: ewh.ieee.org/r6/scv/leos

Traditional optical lithography is reaching the limits of its resolution, and continuing improvements in integrated circuit density are becoming progressively harder.  For the past decade, the semiconductor industry has been working on moving to extreme ultraviolet/soft x-ray wavelengths for exposing photomasks, which should allow significant future reductions in feature size.  The author will discuss the technical challenges faced by the industry in making this transition, and the current state of the art, along with predictions for how the transition will take place.  Getting sufficient power from the EUV sources has been perhaps the main limiting challenge, and he will address some of the problems in this area as well.

20140304scv

Comments are closed.

[IEEE S.F. Bay Area Council - www.e-grid.net] [powered by WordPress .]

SF Bay Area Council

Categories

  • 5G (2)
  • ALL (4,702)
  • Antennas & Propagation (5)
  • BioEngineering (675)
  • Blogroll (33)
  • Circuits (16)
  • Communications (1,862)
  • Computers/Software (1,777)
  • Consumer Electronics (103)
  • Control Systems (23)
  • Electrical/Power (1,284)
  • Electronics Design (2,774)
  • Employment (4)
  • Employment opportunities (7)
  • Engineering Mgmt (1,819)
  • Green energy (48)
  • History (7)
  • Industrial Applications (91)
  • Information Theory (13)
  • Instrument and Measurement (1)
  • Magnetics (30)
  • Microwave (8)
  • NanoEngineering (876)
  • Optics/Displays (969)
  • Photonics (31)
  • PhotoVoltaics (4)
  • Product Safety (25)
  • Reliability (37)
  • Robotics and Automation (19)
  • Semiconductors (1,847)
  • Signal Processing (138)
  • Vehicular Technology (16)
  • Women in Engineering (8)
  • Young Professionals (5)
  •  

    Support our advertisers:

    Visit our
    GRID MARKETPLACE

    Enabling Javascript allows us to show you upcoming conferences in this column.

    For the Firefox browser, select Tools/Options/Content and select "Enable Javascript".

    If you are using Microsoft Internet Explorer you may need to click on the yellow bar above and select 'Allow Blocked Content'. You must then click 'Yes' on the following security warning.

    archives:

    September 2019
    S M T W T F S
    « May    
    1234567
    891011121314
    15161718192021
    22232425262728
    2930  

    View in Google Calendar

    search blog:


    SUBSCRIBE: Get the e-GRID twice a month by email - upcoming IEEE SF Bay Area meetings, conferences.

    RSS Feed Subscribe to our RSS Feed.

    PUBLICIZE your event to IEEE's membership.


    general links:

    22 queries. 0.490 seconds