IEEE S.F. Bay Area Council e-GRID's

Technology & Networking in Silicon Valley & the SF Bay Area: Upcoming Meetings, Courses and Conferences

October 14, 2014

Mtg: Innovative Pressure-Sensing Solutions

by @ 2:07 pm. Filed under ALL, NanoEngineering, Optics/Displays, Semiconductors

WEDNESDAY November 19, 2014
SCV MEMS and Sensors Chapter
– ultra-small devices, DRIE Etch, cavities, non-uniformities …
Speaker: Holger Doering, Chief Operating Officer, Silicon Microstructures, Inc.
Time: Pizza and beverages at 7:15 PM; Presentation at 7:45 PM
Cost: $5 donation for food
Place: Qualcomm Cafe @ Building B, 3165 Kifer Road, Santa Clara
RSVP: from website

MEMS Pressure Sensor portfolio and the different Technologies/Process methods that are used to manufacture them; Specialties of SMI pressure sensors to address niche medical markets as well as high-volume automotive markets; Application examples for SMI pressure sensors in the different markets; Design, Simulation and Process requirements for development and manufacturing of advanced pressure sensors
DRIE Etch for MEMS pressure sensor miniaturization: Comparison of classic wet etch processes to DRIE to create ultra-small devices; Advantages of DRIE in process control to achieve high accuracy and repeatability; Limitation of DRIE etched devices and how they can be addressed by intelligent design; Products at SMI that benefit from the advantages of DRIE Etching; Different approaches of using DRIE formed cavities for pressure sensor devices; Compensation of process related non-uniformities by design adjustments
Automated Optical Inspection (AOI) for defect detection in MEMS Devices: Automated optical Inspection to assure highest quality of MEMS Devices; Importance of visual inspection in MEMS devices to assure reliability; Criteria and methods that are used to detect the different types of defects; Inspection of frontside and backside as well as in different stages of the process to access visually all critical areas; Benefit of having pictures from inspections available as quality gate before shipment; Reduction of Inspection time and cost by automated detection and classification ofdefects by AOI


Comments are closed.

[IEEE S.F. Bay Area Council -] [powered by WordPress .]

SF Bay Area Council


  • 5G (2)
  • ALL (4,702)
  • Antennas & Propagation (5)
  • BioEngineering (675)
  • Blogroll (33)
  • Circuits (16)
  • Communications (1,862)
  • Computers/Software (1,777)
  • Consumer Electronics (103)
  • Control Systems (23)
  • Electrical/Power (1,284)
  • Electronics Design (2,774)
  • Employment (4)
  • Employment opportunities (7)
  • Engineering Mgmt (1,819)
  • Green energy (48)
  • History (7)
  • Industrial Applications (91)
  • Information Theory (13)
  • Instrument and Measurement (1)
  • Magnetics (30)
  • Microwave (8)
  • NanoEngineering (876)
  • Optics/Displays (969)
  • Photonics (31)
  • PhotoVoltaics (4)
  • Product Safety (25)
  • Reliability (37)
  • Robotics and Automation (19)
  • Semiconductors (1,847)
  • Signal Processing (138)
  • Vehicular Technology (16)
  • Women in Engineering (8)
  • Young Professionals (5)

    Support our advertisers:

    Visit our

    Enabling Javascript allows us to show you upcoming conferences in this column.

    For the Firefox browser, select Tools/Options/Content and select "Enable Javascript".

    If you are using Microsoft Internet Explorer you may need to click on the yellow bar above and select 'Allow Blocked Content'. You must then click 'Yes' on the following security warning.


    December 2019
    S M T W T F S
    « May    

    View in Google Calendar

    search blog:

    SUBSCRIBE: Get the e-GRID twice a month by email - upcoming IEEE SF Bay Area meetings, conferences.

    RSS Feed Subscribe to our RSS Feed.

    PUBLICIZE your event to IEEE's membership.

    general links:

    22 queries. 0.281 seconds