IPFA 2012
Marina Bay Sands Singapore
2 - 6 July 2012

Speaker: Dr. Stuart WRIGHT, EDAX, USA

Title: An Introduction to EDS and EBSD for Microelectronics Applications

Abstract: This tutorial will focus on two complementary scanning electronic based techniques: x-ray energy dispersive spectroscopy (EDS) and electron backscatter diffraction (EBSD). EDS enables the chemical composition of materials to be characterized and EBSD provides quantitative information on crystallographic orientation in polycrystalline materials. These techniques are capable of characterizing features in the microstructure at resolutions of a few hundreds of nanometers for the case of EDS and to tens of nanometers for EBSD. The physics behind these techniques will be introduced along with a discussion on good practice for using these techniques to achieve the best results possible. This will be followed by examples of the application of these techniques to the characterization of microelectronic microstructures.

Speaker’s Biography: Dr. Stuart Wright is a senior scientist at EDAX. He is part of the EBSD team located near Salt Lake City, Utah in the United States. Stuart has been involved with EBSD research and development for over twenty years. He first became involved with EBSD as an undergraduate student at Brigham Young University. He went on to Yale University where his PhD thesis research led to the first fully automated EBSD system in late 1991. Stuart and his co-workers received the Henry Marion Howe award for their paper describing this new technique in Materials Transactions. After completing his PhD, Stuart joined Los Alamos National Lab where he continued to develop the technique and expand its application. He left Los Alamos in 1995 to join TSL, a startup company commercializing the automated EBSD technique. He has continued in this role through the purchase of TSL by EDAX and continues to play an important role in the development of modern systems. Stuart enjoys his continued interaction with leading scientists in the materials science community to identify new applications and refinements. His work has lead to many publications in archival journals as well as presentations all over the world.