The effects of proton irradiation on electrothermal micro-actuators
Robert W. Johnstone, Kevin F. Ko, Janey C. Yang, M. Parameswaran, and Lorne S. Erhardt
Micro-assembly of microelectromechanical components into 3-D MEMS
Nikolai Dechev, William L. Cleghorn, and James K. Mills
Tunable CMOS MEMS electromechanical bandpass filters
T. Zhou and A.M. Robinson
Testing for the work envelope of 3-DOF micromanipulators
Yongjun Lai, Dan Sameoto, Ted Hubbard, and Marek Kujath
Gas mixture analysis and vacuum measurement using a CMOS micromachined optical Pirani gauge
Keith B. Brown, Yuan Ma, Ron P.W. Lawson, Walter Allegretto, Fred E. Vermeulen,.
Micromachining and operation of a bistable electrothermal actuator
I.C. Ressejac, L.M. Landsberger, J.F. Currie, and L. Isnard
A comparison between RF MEMS switches and semiconductor switches
P.D. Grant, R.R. Mansour, and M.W. Denhoff
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