Invited Speakers

 

Andrzej J. Strojwas
Keithley Professor of ECE, Carnegie Mellon University Pittsburgh, PA 15213, USA

Title: Yield and Reliability Challenges at 7nm and Below

Abstract: Layout Design Rules have been scaled very aggressively to enable the 7nm technology node without EUV. As a result, achieving acceptable performance and yield in High Volume Manufacturing (HVM) has become an extremely challenging task. Systematic yield and parametric variabilities have become quite significant. Moreover, due to overlay tolerance requirements and diminishing process windows, reliability risks due to soft shorts/leakages and soft opens for both FEOL and BEOL have also increased to a critical level. Introduction of EUV at the second wave of 7nm and 5nm will not help significantly due to increased defectivity and significant increases in Local Edge Roughness. New characterization techniques are necessary to identify the yield and reliability risks. After reviewing the evolution of design rules and classifying the yield and reliability risks, we will present examples from Design-For-Inspection™ (DFI™) and the novel VarScan methodology to “detect the undetectable” defects and characterize variability for both FEOL and BEOL 7nm and below technologies.

Biography: ANDRZEJ J. STROJWAS is Joseph F. and Nancy Keithley Professor of Electrical and Computer Engineering at Carnegie Mellon University. Since 1997 he has served as Chief Technologist at PDF Solutions, Inc. He has held positions at Harris Semiconductor Co., AT&T Bell Laboratories, Texas Instruments, NEC, HITACHI, SEMATECH, KLA-Tencor and PDF Solutions, Inc. He received multiple awards for the best papers published in the IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on Semiconductor Manufacturing and IEEE-ACM Design Automation Conference.  He is also a recipient of the SRC Inventor Recognition Award.   He was the Editor of the IEEE Transactions on CAD of ICAS from 1987 to 1989.  He served as Technical Program Chairman of the 1988 ICCAD and Conference Chairman of the 1989 ICCAD. He has graduated almost 50 Ph.D students and has authored  or co-authored 15 books/book chapters, and more than 350 papers in the leading journals or technical conferences. In 1990 he was elected IEEE Fellow. In 2016 he received the Electronic System Design Alliance Phil Kaufman Award for his pioneering and sustained contributions to Design for Manufacturing.