Short Course B

 

RAKESH KUMAR, GlobalFoundries Singapore

Title: Advancement in MEMS Technology in IoT Era

Abstract: Micro Electromechanical Systems (MEMS) technology has led the development of sensors used for variety of applications in consumer, automotive, industrial, communication, security, home automation and bio-medical fields. In the last decade, MEMS sensors have seen a rapid growth, mainly in consumer and mobile applications due to their miniature sizes, low power operations and cost effectiveness. This growth is expected to continue as more and more sensors are being designed and deployed to interact with environment to enable building of smart systems in this era of Internet of Things (IoT). The course will review the recent development in MEMS technologies and emergence of novel sensors specifically for emerging applications in mobile, autonomous vehicles, wearables and bio-medical fields. The course will cover different types of MEMS sensors and actuators, their working principles and applications. Details of MEMS design, fabrication techniques, packaging and testing of MEMS devices will be discussed along with challenges associated with manufacturing and commercialization of MEMS devices.

Biography: Rakesh Kumar is Senior Director of MEMS Technology Development at GLOBALFOUNDRIES, Singapore. He has over 30 years of experience in the development of semiconductor process technologies for MEMS, CMOS, and silicon based opto-electronics devices. Prior to joining GLOBALFOUNDRIES, he was working at A*STAR Institute of Microelectronics, Singapore responsible for MEMS technology development and its transfer to industry. His areas of expertise include interconnects technologies and 3D wafer level packaging. He has authored and co-authored more than 90 research publications in journals and conferences. Rakesh Kumar received his B.Sc (Hons), and Ph.D. degrees in electrical engineering from Punjab Engineering College, India, and Nanyang Technological University (NTU), Singapore, respectively.