Tutorial 3

The Application of TCAD Simulation Tools for Design Process Optimization Towards Realizing Flexible MEMS-based Sensors

Norhayati Soin
University of Malaya

Abstract: The development of flexible MEMS-based sensors particularly for medical applications has been extensively reported in the literature. However, challenges associated with the fabrication of flexible devices via low temperature deposition especially in the areas of reproducibility and process optimization remain as one of the main hurdles to overcome. The usage of TCAD based simulation tools in the design process optimization provides a faster, more accurate and economical way towards realizing the development of reliable flexible sensors and devices. In this presentation, we will explore the usage of TCAD based simulation tools such as COMSOL and IntelliSuite for the purpose of design process optimization for the development of flexible sensors specifically for three electrode and transistor-based sensor configurations for biomedical application. We will also discuss on how these tools can contribute to the improvement in the fabrication process, which ultimately leads to the optimized performance of the fabricated sensors. Finally, few challenges and trade-offs of using TCAD based simulation tools for design process optimization will be presented and discussed.

Biography: Dr. Norhayati Soin received the B. Eng. (Hons) degree in electrical and electronics engineering from the Liverpool Polytechnic, United Kingdom (1991), MSc degree in Microelectronics Engineering from Liverpool John Moores University, United Kingdom (1999), and PhD degree in Electronics and Systems Engineering from National University of Malaysia (2006). She is currently a Professor at the Electrical Engineering Department, University of Malaya, Malaysia. Her current research focuses on reliability of semiconductor devices/integrated circuit and MEMS sensor, and development of flexible and printable electronics devices.

Norhayati Soin leads the VLSI Reliability Research Group and Center of Printable Electronics at University Malaya, a research centre with cutting-edge facilities solely dedicated to the design, development, and fabrication of printed electronics devices for various novel applications. She has been awarded IEEE Senior Member and currently is the past Chair of IEEE Electron Device Society Malaysia Chapter. Her work has been published in more than 150 papers in journals and proceedings locally and internationally. Dr. Norhayati Soin is a regular reviewer for many high-ranked journals (including IEEE Transaction of Electron Devices, IEEE Access and Elsevier Science Journal). She is the principal investigator for various local and international research and industry grants (UM grant, CREST, FRGS, TRGS, Science Fund, British Newton Fund) on different topics ranging from IC reliability to the development of flexible multi-sensors patch for healthcare applications.