Tutorial Speaker

Keystones of Optical and Extreme Ultra-Violet Lithography

Hyekeun Oh (Hanyang University)

Biography: “Hye-Keun Oh”, Ph.D. has been a professor of Applied Physics Department at Hanyang University since 1991. He has been a lithographer, whose interest in semiconductor manufacturing lithography even though he stays at academia. He is currently focused on EUV pellicles and computational lithography. Prior to joining Hanyang University, he was a senior engineer for Hyundai Electronics for 2 years doing e-beam and phase shift mask. ”Oh” received a Ph. D. degree in physics from Indiana University, Bloomington, IN, USA and BS in physics education from Seoul National University.