Plenary Speaker

Semiconductor Manufacturing Challenges toward 2030 and beyond

Junichi Kitano (TEL)

Biography: Junichi Kitano is deputy general manager of corporate innovation division at Tokyo Electron Ltd., vice president and general manager at Tokyo Electron Kyushu Ltd., and member of the board at TEL Manufacturing and Engineering of America, Inc. He is leading process and hardware R&D at Tokyo Electron Group. He joined Tokyo Electron Ltd., in 1991 and has been responsible for lithography/coater developer, cleaning, advanced package, yield improvement and future generation development. He has contributed many innovations relating to each generation lithography and cleaning technology.