Invited Speaker

Hybrid SPM Metrology and Defect Inspection Technologies in Advanced Process Control

Sang-Joon Cho (Park Systems Corp.)

Biography: Sang-Joon Cho, Ph.D. is the director of the R&D Application Technology Center at Park Systems where he oversees a staff of 58 (23 in Korea, 25 abroad) Scientists and Engineers. Dr. Cho also holds the position of EVP of Sales at Park Systems Corp. Previously, he held the position of Director of R&D (2005-2017). His work over 20 years has built on diverse expertise in basic biomedical science and instrumentation and application development of SPM for Nano-metrology, most prominently for the media and semiconductor industries and Biomedical Science. He has been recognized with various awards and nationally funded research grants. In 2022, Dr. Cho directs three national grants of approximately $20M for the development of AFM technologies and industrial applications. For his technological contributions as a scientist, he was awarded South Korea's Science and Technology Medal in 2021.