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Past
Meeting
Wednesday,
November 8th, 2006
Title: Noise Modeling and
Characterization of Piezoresistive Transducers
Presented by: Associate
Professor Toshikazu (Toshi) Nishida, Ph. D., University of Florida.
Abstract: Detailed results
on modeling and experimental characterization applicable to piezoresistive
MEMS transducers using a piezoresistive MEMS microphone as an example.
To accurately model the lower limit of the dynamic range of piezoresistive
MEMS transducers, a detailed noise equivalent circuit, piezoresistor
noise model, and experimental noise measurements are needed. From
the sensitivity and the total root-mean-square output noise, the
minimum detectable signal (MDS) may be computed. Key experimental
results include comparison of the DC bridge and AC bridge noise
measurement techniques and use of the AC measurement technique when
the piezoresistive transducer output noise is less than the low
frequency DC setup noise.
Biography: Toshikazu (Toshi)
Nishida is currently an associate professor in the Department of
Electrical and Computer Engineering (ECE) and an Affiliate Associate
Professor in the Department of Mechanical and Aerospace Engineering
(MAE) at the University of Florida, Gainesville, Florida. He is
a founding member of the Interdisciplinary Microsystems Group at
the University of Florida. His research interests include solid-state
physical sensors and actuators, transducer noise, strained semiconductor
devices, and reliability physics of semiconductor devices. He and
his students are currently investigating strain effects in piezoresistive
microelectromechanical systems (MEMS) transducers and advanced CMOS
devices, noise mechanisms in piezoresistive MEMS transducers, MEMS
piezoelectric transducers for vibrational energy reclamation, MEMS
capacitive microphones, and biomedical applications of MEMS.
He received his Ph.D. (1988) and
M.S. degrees in Electrical and Computer
engineering and B.S. degree in Engineering physics at the University
of
Illinois at Urbana-Champaign. With colleagues and students, he has
received three best paper awards. He also received the 2003 College
of
Engineering Teacher of the Year award. He holds four U.S. patents.
Presented Jointly with:
the Circuits and Systems Society's Distinguished Lecturer Program
Social and free snacks:
6:30 PM
Lecture:
7 PM
Place: Bowe
Bell & Howell [Company directions]
760
S Wolf Rd, Wheeling, IL 60090 [Mapquest directions]
at the "Da Vinci" conference room
Presented by:
ED/CAS/SSC Chicago Chapter
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