20�me conf�rence canadienne de g�nie �lectrique et informatique (CCGEI 2007)

Information
Touristique
Vancouver
Notre avenir commun 22-26 avril 2007
Sheraton Wall Centre Hotel
1088 Burrard Street, Vancouver
Colombie-Britannique, Canada

Programme technique d�taill�


Session 17: MEMS Techniques

Chair: Kenichi Takahata, University of British Columbia
Room: Junior Ballroom A
Time: Monday, 1:40pm-3:20pm
  
17.1 High Mechanical Bandwidth Polysilicon Micromirrors for Large Area/High Deflection Angle Micromirror Arrays
R. Hoskinson,   I. Mansoor,   B. Stoeber
17.2 Spin-on Glass as a Sacrificial Layer for Patterned Metallization of Compliant SU-8 Microstructures
See-Ho Tsang,   Abdul Haseeb Ma,   M. Parameswaran,   A. M. Leung
17.3 A Free-Space Tunable Beam Expander Designed for Automated Assembly
See-Ho Tsang,   D. Sameoto,   M. Parameswaran
17.4 Assembly and Characterization of Buckled Cantilever Platforms for Thermal Isolation in a Polymer Micromachining Process
Dan Sameoto,   Abdul Haseeb Ma,   M. Parameswaran,   Albert M. Leung
17.5 Polydimethylglutarimide as a Structural MEMS Material
Ian G. Foulds,   Robert W. Johnstone,   M. Hamidi,   See-Ho Tsang,   M. Parameswaran



Commandit� par l'IEEE Canada et les sections IEEE Vancouver et IEEE Victoria.
derni�re mise � jour: 2007-4-19 par webmestre