Impressum

The purpose of these pages ist non-commercial and aims only at informing the members of Technical Chapter 17 (tc17) as well as persons interested in MEMS Packaging.

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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM

(Fraunhofer Institute for Reliability and Microintegration)

Gustav-Meyer-Allee 25

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Germany

Erik Jung

erju@izm.fhg.de

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Tanja Coen

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Letzte Änderung / Last update: 2003-01-26