7B  Plasma Processing Applications (oral)

Thursday, June 24  9:30-12:00  Hampton Rds V

Session Chair:  Yukinori Sakiyama

9:30  7B-1 LAYER REMOVAL FROM TRISO-COATED PARTICLES WITH A COLD PLASMA

J. I. van der Walt1, J. J. Nel1, P. P. Crouse2

1R&D, Necsa, Pelindaba, South Africa
2Department of Chemical Engineering, University of Pretoria, Pretoria, South Africa

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9:45  7B-2 SEALING OF POROUS LOW-K DIELECTRICS DURING PLASMA ETCHING WITH H2 PLASMA CLEANING

J. Shoeb1, M. J. Kushner2

1Electrical and Computer Engineering, Iowa State University, Ames, IA, USA
2Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI, USA

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10:00  7B-3 FLUORINATION OF POLYPROPYLENE BY REMOTE INDUCTIVELY COUPLED PLASMAS SUSTAINED IN AR/F2 AND AR/NF3 MIXTURES

S. -H. Song1, Y. Yang2, M. J. Kushner1, M. Strobel3, S. Kirk3

1University of Michigan, Ann Arbor, MI, USA
2Iowa State University, Ames, IA, USA
33M Company, St. Paul, NM, USA

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10:15  7B-4 THE DEVELOPMENT AND ANALYSIS OF PLASMA MICROFLUIDIC DEVICES

O. T. Olabanji, D. Bakewell, J. W. Bradley

Electrical Engineering and Electronics, The University of Liverpool, England, United Kingdom

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10:30  7B-5 PLASMA ASSISTED CONVERSION OF PYROGAS

F. Odeyemi, A. Rabinovich, A. Fridman

A.J DREXEL PLASMA INSTITUTE, Drexel University, PHILADELPHIA, PA, United States

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10:45  7B-6 PLASMA CONTROLLED REFORMING PROCESS OF HYDROCARBON FUELS

D. H. Lee, K. -T. Kim, M. S. Cha, Y. -H. Song

Environmental Sytemt Research Division, Korea Institite of Machinery and Materials, Daejeon, South Korea

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11:00  7B-7 PLASMA-ENHANCED POLYMER DEPOSITION IN AMBIENT ENVIRONMENT CONDITIONS USING DIELECTRIC BARRIER DISCHARGE PLASMA JET

T. -C. Tsai, D. Staack

Dept. of Mechanical Engineering, Texas A&M University, College Station, TX, United States

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11:15  7B-8 ELUCIDATION OF LEVELS OF BACTERIAL VIABILITY POST-NON-EQUILIBRIUM DIELECTRIC BARRIER DISCHARGE PLASMA TREATMENT

M. Cooper, G. Fridman, S. Joshi, A. Fridman

A. J. Drexel Plasma Institute, Philadelphia, United States

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11:30  7B-9 REFORMING AND FIXATION OF CARBON OXIDES IN ATMOSPHERIC PRESSURE NON-THERMAL CO/CO2 PLASMAS

R. Geiger, D. Staack

Mechanical Engineering, Texas A&M University, College Station, TX, United States

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11:45  7B-10 GRADIENT MECHANISM OF DETONATION INITIATION UNDER ACTION OF HIGHVOLTAGE NANOSECOND DISCHARGE

A. Starikovskiy1, A. Rakitin2

1Drexel University, Philadelphia, United States
2NEQLab Research, The Hague, The Netherlands

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