7C  Plasma, Ion and electron sources (oral)

Thursday, June 24  9:30-12:00  Hampton Rds I-II-III

9:30  7C-1 GENERATION OF DENSE PLASMAS AT LOW AVERAGE POWER INPUT BY POWER PULSING

I. Alexeff¹, T. Anderson²

¹Electrical Engineering, University of TN, Knoxville, TN 37916, United States
²Haleakala R & D, Inc., 7 Martin Rd., Brookfield, MA, 01506, United States

9:45  7C-2 SELF-CONSISTENT SIMULATION STUDY ON THE MAGNETIZED INDUCTIVELY COUPLED PLASMA FOR 450 MM SEMICONDUCTOR WAFER PROCESSING

H. -J. Lee

School of EE, Pusan National University, Busan, South Korea

10:00  7C-3 NUMERICAL SIMULATION OF THE ELECTRODE IMPEDANCE EFFECT IN CAPACITIVE RADIO FREQUENCY DISCHARGES

M. Engelhardt¹, D. Ziegler¹, R. P. Brinkmann¹, T. Mussenbrock¹, Y. Yamazawa²

¹Ruhr University Bochum, Bochum, Germany
²Tokyo Electron AT Ltd, Yamanashi, Japan

10:15  7C-4 EFFECT OF NONIDEAL PLASMA MODEL ON THE CALCULATION OF PLASMA PARAMETERS IN AN ELECTROTHERMAL PLASMA SOURCE

A. L. Winfrey¹, J. G. Gilligan², M. A. Bourham², M. A. Abd Al-Halim³

¹Department of Mechanical Engineering, North Carolina State University, Raleigh, NC, United States
²Department of Nuclear Engineering, North Carolina State University, Raleigh, NC, United States
³Department of Physics, Benha University, Benha, Egypt

10:30  7C-5 MAGNETIZED MICROPLASMAS GENERATED IN A NARROW QUARTZ TUBE

H. Yoshiki

Department of Electrical and Electronic Engineering, Tsuruoka National College of Technology, Tsuruoka, Japan

10:45  7C-6 LASER INDUCED FLUORESCENCE OF THE FERROELECTRIC PLASMA SOURCE ASSISTED HOLLOW ANODE DISCHARGE

V. Vekselman¹, J. Gleizer¹, S. Yatom¹, D. Yarmolich¹, V. Gurovich¹, G. Bazalitski¹, Y. Krasik¹, V. Bernshtam²

¹Physics Dept., Technion, Haifa, Israel
²Physics Dept., Weizmann Institute of Science, Rehovot, Israel

11:00  7C-7 FREQUENCY PROBE MEASUREMENTS IN ELECTRON BEAM GENERATED PLASMAS

D. R. Boris, S. G. Walton, M. Baraket, E. H. Lock, R. F. Fernsler

Plasma Physics, Naval Research Laboratory, Washington, DC, United States

11:15  7C-8 THE GENERATION AND CHARACTERISTIC STUDY OF LARGE-VOLUME MICROWAVE PLASMA PRODUCED WITH PARELLEL RECTANGULAR WAVEGUIDES

Q. Zhang

Tsinghua University, beijing, China

11:30  7C-9 DIAGNOSTICS OF SUBMICRON MULTI-ELEMENT FOCUSED ION BEAMS FROM AN INTENSE MICROWAVE PLASMA

J. V. Mathew, S. Bhattacharjee

Department of Physics, Indian Institute of Technology Kanpur, Kanpur, Uttar Pradesh, India

11:45  7C-10 HIGH CURRENT DENSITY LONG LIFE CATHODES

L. Ives¹, L. R. Falce¹, G. Collins¹, D. Marsden¹, G. Miram¹, S. Schwartzkopf², B. Smith²

¹Calabazas Creek Research, Inc., San Mateo, CA, United States
²Ron Witherspoon, Inc., Campbell, CA, United States