Introduction

"IEEE Workshop on MEMS, Microfluidics & Microsystems with Hands-on training in Device Simulation & Microfabrication Process" is being jointly organized by IEEE Student Branch, WiE Affinity group of IIT Kharagpur and IEEE EMB Student Club IIT Kharagpur. The workshop aims to provide an excellent forum to interact and share ideas on the MEMS and microelectronics system, technologies, emerging applications with hands-on simulation and fabrication procedure to the students, researchers and faculties working in the area of MEMS sensing and technology. This will be a three days workshop where experts from industries and academia are invited to share their knowledge in the respective fields.

Areas to be Covered

	Evolution of MEMS & Microsystems
	Microfabrication Process Technology
	Inertial and RF MEMS
	Microfluidics and BioMEMS
	Packaging of MEMS Devices
	Electronics Interface for MEMS
	Hands-on simulation in COMSOL
	COMSOL tools for MEMS design and simulation
	Application specific Modules hands-on
	Advanced Modeling of MEMS devices with special emphasis on device meshing, simulation convergence, error handling and important post processing tools.
	MEMS design hands on - AC/DC, inertial, RF, Bio/Microfluidics
	Laboratory visits and hands-on training in microfabrication
	Wafer cleaning and oxidation
	Photolithography process
	Soft-lithography process
	Demonstration of some fabricated MEMS devices
	Visit to Microelectronics Lab, BioMEMS Lab, Microfluidics Lab, National MEMS Design Lab sponsored by NPMASS

Who can attend:

Engineering graduate and undergraduate students from various colleges having a background in Electrical, Electronics, Instrumentation, Biomedical, Mechanical, Chemical Engineering and Biotechnology from all over the country, who would like to explore into this exciting area of sensors with potentials for innovative design solutions are encouraged to attend the workshop. Also, researchers and faculties from various backgrounds pursuing their interdisciplinary research career in MEMS and Microsystems applications are welcomed to participate.