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Tutorials Micro-Optic and Fiber Optic Sensors Terahertz Sensing Noise Harvesting Chemical and Gas Sensing Industrial Tomography Silicon Piezoresistive Stress Sensors Miniaturised Space Payloads Integrated Gas Sensors Sensors as Communication Channels Nanophotonic Sensors Biopolymer Detection Integrated Radar Sensors Ultrasonics |
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A comprehensive overview of piezoresistive sensors in silicon integrated circuit processes is presented including coverage of sensor theory, design, calibration, and error analysis, test chip design, and a variety of applications. The authors of this tutorial are an interdisciplinary team that have worked together on the design and application of piezoresistive stress sensors for more than two decades and published a large body of work in this field. Professors Jaeger and Suhling have extensive experience in both classroom and tutorial settings. In this case, the tutorial will be presented by R. C. Jaeger. Biography Richard C. Jaeger was born in New York, New York, on September 2, 1944. He received the BS and ME degrees in Electrical Engineering in 1966 and the PhD degree in 1969, all from the University of Florida, Gainesville. From 1969 to 1979 he was with the IBM Corporation working on precision analog design, I2L, microprocessor architecture and low temperature MOS device and circuit behavior. In 1979 he joined Auburn University where he was Distinguished University Professor in Electrical and Computer Engineering and served as Founding Director of the Alabama Microelectronics Science and Technology Center from 1984 through 2000. During 2001-2003, he led implementation of Auburn University's new Bachelor of Wireless Engineering degree program, an interdisciplinary effort of the ECE and CSSE Departments. Dr. Jaeger retired from Auburn University as of January 1, 2008 and is now Professor Emeritus. He has published over 300 technical papers and articles, and authored or co-authored Introduction to Microelectronic Fabrication (2E), Microelectronic Circuit Design (3E), and Computerized Circuit Design Using SPICE Programs. He received the IEEE Education Society Jacob Millman/McGraw-Hill Award for outstanding textbook development in 1998 and received the IEEE Undergraduate Teaching Award in 2004. He is a past Editor of the IEEE Journal of Solid-State Circuits, a member of the Solid- State Circuits Society AdCom, and is immediate Past President of the Society. He was Program Chairman for the 1993 International Solid-State Circuits Conference, and Chairman of the 1990 VLSI Circuits Symposium. From 1980 to 1982 he served as founding Editor-in-Chief of IEEE MICRO, and subsequently received an Outstanding Contribution Award from the IEEE Computer Society for development of that magazine. He was selected as one of the IEEE Computer Society's "Golden Core" and received an IEEE Third Millennium Medal. Dr. Jaeger was elected Fellow of the IEEE in 1986 and appointed to the Distinguished University Professorship by Auburn University in 1990. |
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