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May 12 to 15, 2002
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TECHNICAL PROGRAM

TM2 Oral Session:
Nanotechnology & Micromachining 2
Tuesday Morning, May 14
Time:
Room:		 09h30 - 10h30
Salon AB		 Chairs:
  • C. Oliver
  • K. Stanley
    • TM2.1 (358) 09h30 - 09h50
    Fabrication of a micromachined direct Methanol fuel cell
    Stanley, K., Wu, Q., Vanderhock, T., Nikumb, S., Walker, Z.*, Parameswaran, M.**
    National Research Council of Canada
    *University of New Brunswick
    **Simon Fraser University

    IEEE CCECE02 Proceedings; ISBN: 0-7803-7514-9; vol. 1, pp. 450-454

    TM2.2 (210) 09h50 - 10h10
    Sub-zeptofarad sensitivity scanning capacitance microscopy
    Tran, T., Oliver, D., Thomson, D., and Bridges, G.
    Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, Canada

    IEEE CCECE02 Proceedings; ISBN: 0-7803-7514-9; vol. 1, pp. 455-459

    TM2.3 (262) 10h10 - 10h30
    Deep etching of silicon with XeF2 gas
    Bahreyni, B. and Shafai, C.
    Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, Canada

    IEEE CCECE02 Proceedings; ISBN: 0-7803-7514-9; vol. 1, pp. 460-464



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