Hybrid integration of RF MEMS multiport switches
Daneshmand, M. ; Mansour, R.R.
Performance assessment of a multi-level repulsive-force out-of-plane microelectrostatic actuator
He, S. ; Mrad, R.B.
Theoretical and experimental analysis of an off-chip microgripper
Fraser, J. ; Hubbard, Ted ; Kujath, Marek
Application of twin-beam structures for estimation of material properties and sensor fabrication
Bahreyni, Behraad ; Shafai, C.
A high-tuning-range MEMS variable capacitor using carrier beams
Bakri-Kassem, M. ; Mansour, R.R.
Out-of-plane electrothermal actuators in silicon-on-insulator technology
See-Ho Tsang ; Sameoto, D. ; Parameswaran, M.
Suspended on-chip RF MEMS components fabricated using PolyMUMPs technology
Fouladi, S. ; Bakri-Kassem, M. ; Mansour, R.R.
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