Semiconductor manufacturing tools, such as cluster tools, are a kind of highly automated and computer-controlled systems. It is a great challenge to effectively operate such systems. Modeling, performance evaluation, scheduling, operations, and control of such systems are necessary in order to reduce production cost, increase productivity, guarantee safety, improve quality, and save resource and energy. The invited sessions aim to bring researchers, engineers, scientists, and managers engaged in research, development, and operation of semiconductor manufacturing tools to tackle various modeling, scheduling, operation, and control issues in such systems subject to different settings. Prospective authors are invited to share their academic results and practical experiences to deal with these challenging issues in this area.
