FemtoTools AG Furtbachstrasse 4 Buchs ZH, 8107 SWITZERLAND phone: -41-44-844-4425 fax: +41-44-844-4427 info@femtotools.com www.femtotools.com Booth 32-33 FemtoTools presents the world's first MEMS Probestation for the combined mechanical and electrical testing of microfabricated sensors and actuators. This system combines the features of an electrical probe station, a measurement microscope, a mechanical testing instrument and a variety of power sources, an oscilloscope and a LCR-meter. The combination of these instruments allows for the direct, wafer-level testing of various MEMS-based devices, without the need to develop dedicated readout electronics and testing software. |