| Steering Committee |
| EDS VP of Technical Activities and Meetings (Chair) | Kazunari Ishimaru | Kioxia Corporation |
| EDS President | Meyya Meyyappan | NASA Ames |
| EDS President-Elect | Ravi Todi | Western Digital |
| EDS Jr. Past President | Fernando Guarin | Globalfoundries |
| EDS Sr. Past President | Samar Saha | Prospicient Devices |
| EDS Treasurer | Bin Zhao | ON Semiconductor |
| Co-General Chair EDTM 2020 | Arjun Kantimahanti | Silterra |
| EDTM 2019 Co-General Chair | Geok Ing Ng | Nanyang Technological University, Singapore |
| EDTM 2019 Co-General Chair | MK Radhakrishnan | NanoRel |
| EDTM 2018 General Chair | Hitoshi Wakabayashi | Tokyo Institute of Technology |
| EDTM 2017 General Chair | Shuji Ikeda | Tei-Solutions |
| |
| Executive Committee |
| Co-General Chair | Arjun Kantimahanti | Silterra |
| Co-General Chair | Samar Saha | Prospicient Devices |
| Technical Program Committee (TPC) Chair | Arokia Nathan | Cambridge Touch Technologies, Ltd. |
| TPC Vice Chair | Jagadheswaran Rajendran | University Sains Malaysia |
| EDTM 2021 General Chair | Albert Wang | University of California, Riverside |
| Publications Chair | Susthitha Menon | Universiti Kebangsaan Malaysia |
| Education/Short-course Chair | Muhammad Mustafa Hussain | King Abdullah University of Science and Technology |
| Education/Short-course Vice Chair | Harikishnan Ramiah | University of Malaysia |
| Publicity Chair | Ru Huang | Peking University |
| Publicity Vice Chair | Asrulnizam Abdul Manaf | University Sains Malaysia |
| Financial Committee Chair | Subramanian Iyer | University of California, Los Angeles |
| Financial Committee Vice Chair | Keith Moey | FlexTTech, Inc. |
| Exhibits and Sponsorship Co-Chair | Tahiruddin Haji Hamdan | Silterra |
| Exhibits and Sponsorship Co-Chair | Kazunari Ishimaru | Kioxia Corporation |
| Exhibits and Sponsorship Vice Chair | Aabid Husain | Atomera, Inc. |
| International Advisory Committee Chair | Reza Arghavani | Sandia National Laboratories |
| International Advisory Committee Vice Chair | Jacobus Swart | University of Campinas |
| Conference Planning / Local Arrangement Chair | Subhash Rustagi | Silterra |
| |
| International Advisory Committee |
| Chair | Reza Arghavani | Sandia National Laboratories |
| Vice Chair | Jacobus Swart | University of Campinas |
| Member | Firdaus Abdullah | Silterra |
| Member | Kaustav Banerjee | University of California, Santa Barbara |
| Member | Shuji Ikeda | Tei-Solutions |
| Member | Hitoshi Wakabayashi | Tokyo Institute of Technology |
| Member | Don Disney | Infineon |
| Member | Bin Zhao | ON Semiconductor |
| Member | Robert Mears | Atomera, Inc. |
| Member | Jamal Deen | McMaster University |
| Member | Anisul Haque | East West University |
| Member | Paul K.L. Yu | University of California, San Diego |
| Member | Cor Claeys | KU Leuven |
| Member | Cary Yang | Santa Clara University |
| Member | Ilesenmi Adesida | Nazarbayev University |
| Member | Hiroshi Iwai | Tokyo Institute of Technology |
| Member | Vivek Jain | Maxim Integrated |
| Member | Siegfried Selberherr | TU Vienna |
| Member | Joachim Burghartz | IMS-Chips |
| Member | Chandan Sarkar | Jadavpur University |
| Member | Md. Kamrul Alam Khan | Jagannath University |
| Member | Abhijit Biswas | Calcutta University |
| Member | Suman Datta | University of Notre Dame |
| Member | Sagar Pushpala | TSMC NA |
| |
| Sponsorships & Exhibition Committee |
| Co-Chair | Tahiruddin Haji Hamdan | Silterra |
| Co-Chair | Kazunari Ishimaru | Kioxia Corporation |
| Vice-chair | Aabid Husain | Atomera, Inc. |
| |
| Finance Committee |
| Chair | Subramanian Iyer | University of California, Los Angeles |
| Vice-chair | Keith Moey | FlexTTech, Inc. |
| Member | Ravi Todi | Western Digital |
| Member | Bernard Lim | Jabil Circuit Sdn Bhd |
| Member | Daniel Kho | Logik Haus Sdn Bhd |
| Member | Subhash Rustagi | Silterra |
| Member | Samar Saha | Prospicient Devices |
| Member | MK Radhakrishnan | NanoRel |
| |
| Technical Program Committee (TPC) |
| Subcommittee: Materials |
| Chair | Saptarshi Das | Pennsylvania State University |
| Vice-chair | Pei-Wen Li | National Chiao Tung University |
| Member | Kazuhito Matsukawa | SUMCO |
| Member | Chun-Jung Su | National Nano Device Labs |
| Member | Yang Xu | Zhejiang University |
| Member | Paul Berger | Ohio State University |
| Member | Nava Kanta Bhat | Indian Institute of Science |
| Member | Suprem Das | Kansas State University |
| Member | Asrul Nizam | University Sains Malaysia |
| |
| Subcommittee: Process and Tools for Manufacturing |
| Chair | Anupam Mitra | Kioxia Corporation |
| Vice-chair | Bich-Yen Nguyen | Soitech |
| Member | Yasushi Akasaka | Tokyo Electron Technology Solutions Ltd. |
| Member | Xiaojun Guo | Shanghai Jiao Tong Univ. |
| Member | Yao-Jen Lee | TSRI |
| Member | Keiichi Nakazawa | Sony Semiconductor |
| Member | Navab Singh | Astar IME |
| Member | Tan Danny | Infineon |
| Member | Edward Bautista | MIMOS |
| Member | Makoto Miura | Hitachi High-Technologies Corporation |
| Member | Hiroshi Yamashita | NuFlare Technology, Inc. |
| Member | Hajime Takeuchi | Canon Corporation |
| Member | Sanjiv Sambandan | Cambridge University |
| |
| Subcommittee: Devices and Smart Systems for Internet of Things (IoT) |
| Chair | Naoto Horiguchi | IMEC |
| Vice-chair | Sachin Sonkusale | Solarlytics, Inc. |
| Member | Yukinori Morita | AIST |
| Member | Abhisek Dixit | Indian Institute of Technology, Delhi |
| Member | Gong Xiao | National Univ. of Singapore |
| Member | Masumi Saitoh | Kioxia Corporation |
| Member | Hyungcheol Shin | Seoul National Univ. |
| Member | Kejun Xia | NXP Semiconductors |
| Member | Carlo Reita | CEA-LETI |
| Member | Tian-Li Wu | National Chiao Tung Univ. |
| Member | Yi Yang | Tsinghua University |
| Member | Milan Pesic | MDLSoft |
| Member | Ankush Bag | Indian Institute of Technology, Mandi |
| Member | Chen Jiang | University of Cambridge |
| Member | Christofer Hierold | ETH Zuric |
| Member | Roger Booth | Qualcomm |
| Member | Young-Young Noh | Pohang University of Science and Technology |
| Member | Ting-Ling Ren | Tsinghua University |
| |
| Subcommittee: Smart Power and Renewable Energy Devices |
| Chair | Srabanti Chowdhury | Stanford University |
| Vice Chair | Saad Mekhilef | University of Malaya |
| Member | Wai Tung Ng | University of Toronto |
| Member | Kalyan Koley | Indian Institute of Technology, Dhanbad |
| Member | Rajkumar Dharampal | Infineon |
| Member | N. Mohan Kumar | Gitam Institute of Technology and Management |
| Member | Robert Pan | Silterra |
| Member | David Sheridan | Alpha and Omega Semiconductor |
| Member | Tan Chan Lik | Infineon |
| Member | Shreepad Karmalkar | Indian Institute of Technology, Madras |
| |
| Subcommittee: Modeling and Simulation |
| Chair | Risho Koh | Renesas |
| Vice Chair | Yogesh Singh Chauhan | Indian Institute of Technology, Kanpur |
| Member | Dondee Navarro | Hiroshima University |
| Member | Xian-Ping Chen | Chongqing University |
| Member | Darsen Lu | National Cheng Kung University |
| Member | Takeshi Naito | Kioxia Corporation |
| Member | Andreas Schenk | ETH |
| Member | Paul Lining Zhang | Shenzhen University |
| Member | Benjamin Iniguez | Universitat Rovira, Virgili |
| Member | Victor Moroz | Synopsys |
| Member | Atanu Kundu | Heritage Institute of Technology, Kolkata |
| Member | Slobodan Mijalkovic | Silvaco |
| Member | Elena Gnani | University of Bologna |
| Member | Xiang Cheng | Cambridge Touch Technologies |
| Member | Nihar Ranjan Mohapatra | Indian Institute of Technology, Gandhinagar |
| Member | Subhash Rustagi | Silterra |
| Member | Arka Dutta | Samsung |
| Member | Kumar Prasannajit Pradhan | Indian Institute of Information Technology, Design and Manufacturing |
| |
| Subcommittee: Reliability |
| Chair | Mahadeva Iyer Natarajan | Allegromicro |
| Vice-chair | Norhayati Binti Soin | University of Malaya |
| Member | Runsheng Wang | Peking University |
| Member | Dimitri Linten | IMEC |
| Member | Rakesh Ranjan | Samsung |
| Member | Ang Diing Shenp | NTU Singapore |
| Member | Nik Ahmad Fadzil | MIMOS |
| Member | Lau Yew Huang | Silterra |
| Member | Byoung Min | Globalfoundries |
| Member | Durgamadhab Misra | New Jersey Institute of Technology |
| Member | Thomas Keaureuf | Globalfoundries |
| |
| Subcommittee: Packaging and Heterogeneous Integration |
| Chair | Piyush Gupta | Qualcomm |
| Vice-chair | Jin Kim | Google |
| Member | Yoichiro Kurita | Toshiba |
| Member | Kamal Sikka | IBM |
| Member | Jian Cai | Tsinghua University |
| Member | Naoki Oka | Applied Materials Japan, Inc |
| Member | Mukta Farooq | IBM |
| Member | Navas Kalandar | Infineon |
| Member | CS premachandran | Globalfoundries |
| Member | Vivek Dutta | EMD Performance Materials |
| Member | Sungdong Kim | Seoul National University of Science and Technology |
| |
| Subcommittee: Yield and Manufacturing |
| Chair | William (Bill) Nehrer | Applied Materials |
| Vice-chair | Tomasz Brozek | PDF Solutions |
| Member | Coming Chen | Silicon Intellectual Property Technology |
| Member | Keizo Hiraga | Sony |
| Member | Rebecca Mih | Lam Research Co., Ltd. |
| Member | Sanjiv Mittal | Applied Materials |
| Member | Angelo Pinto | Qualcomm |
| Member | Steve Poon | Apple Inc. |
| Member | Bernard Lim | Jabil Circuit Sdn Bhd |
| |
| Subcommittee: Emerging Technologies - Photonics, Biophotonics, and Optoelectronics |
| Chair | Juzer Vasi | Indian Institute of Technology, Bombay |
| Vice-chair | Burhanuddin Yeop Majlis | Universiti Kebangsaan Malaysia (UKM) |
| Member | John Dallesasse | University of Illinois |
| Member | Charles Surya | Nazarbayev University |
| Member | Gang Li | Hong Kong Polytechnic University |
| Member | Lawrence Kazmerski | National Renewable Energy Laboratory |
| Member | Hanbin Ma | ACXEL Tech Ltd. |
| Member | Kai Wang | Sun yat-sen University |
| Member | Hang Zhou | Peking University |
| Member | Lim Jun Jun | OSRAM |
| Member | Meenatchi Sundram | Silterra |
| Member | Grace Chai Mei Ting | University of Southampton |
| Member | Kasturi Saha | Indian Institute of Technology, Bombay |
| |
| Subcommittee: Artificial Intelligence and Machine Learning |
| Chair | Wai Yie Leong | MAHSA UNIV |
| Vice-chair | Ru Huang | Peking University |
| Member | Nor Ashidi Mat Isa | Universiti Sains Malaysia |
| Member | Fabrice Meriaudeau | Universiti de Bourgogne |
| Member | Chetan Arora | Indian Institute of Technology, Delhi |
| Member | Mohd Noor Mohd Halim | Universiti Sains Malaysia |
| Member | Nor Samsiah Sani | Universiti Kebangsaan Malaysia |
| |
| Special Session: Reliability |
| Chair | Souvik Mahapatra | Indian Institute of Technology, Bombay |