| Steering Committee | 
| EDS VP of Meetings and Conferences (Chair) | Kazunari Ishimaru | Kioxia | 
| EDS President | Ravi Todi | Western Digital | 
| EDS Jr. Past President | Fernando Guarin | Globalfoundries | 
| EDS Sr. Past President | Samar Saha | Prospicient Devices | 
| EDS Secretary | M.K. Radharkrishnan | NanoRel | 
| EDS Treasurer | Bin Zhao | Iotelligent | 
| EDTM 2017 General Chair | Shuji Ikeda | tei Solutions | 
| EDTM 2018 General Chair | Hitoshi Wakabayashi | Tokyo Institute of Technology | 
| EDTM 2019 General Chair | Geok Ing Ng | Nanyang Technological University | 
| EDTM 2021 General Chair | Albert Wang | University of California, Riverside | 
|   | 
| Executive Committee | 
| General Chair | Kazunari Ishimaru | Kioxia | 
| General Co-Chair | Changrock Song | SK Hynix | 
| Technical Program Committee Chair | Masumi Saitoh | Kioxia | 
| Technical Program Committee Vice-chair | KangWook Lee | SK Hynix | 
| Education/Short-course/Tutorial Chair | Navakanta Bhat  | Indian Institute of Science | 
| Education/Short-course/Tutorial Vice-chair | P. Susthitha Menon | Universiti Kebangsaan Malaysia | 
| Publications Chair | Hitoshi Wakabayashi | Tokyo Institute of Technology | 
| Publicity Chair | Masaharu Kobayashi | The University of Tokyo | 
| Publicity Vice-chair | Pei-Wen Li | National Yang Ming Chiao Tung University | 
| Secretary | Kensuke Ota | Kioxia | 
| Emerging Technologies Committee Chair | John Dallessase | University of Illinois at Urbana-Champaign | 
| Emerging Technologies Committee Vice-chair | Huaqiang Wu | Tsinghua University | 
| Financial Committee Chair | Iriya Muneta | Tokyo Institute of Technology | 
| Financial Committee Vice-chair | Bin Zhao | Iotelligent | 
| Sponsorship & Exhibition Chair | Shuji Ikeda | tei Solutions | 
| Sponsorship & Exhibition Vice-chair | Aabid Husain | Atomera | 
| Special Session Chair | Shinichi Ogawa | AIST | 
| Special Session Co-Chair | Shuji Ikeda | tei Solutions | 
| International Advisory Committee Chair | Tsu-Jae King Liu | University of California, Berkeley | 
| Industrial Advisory Committee Chair | Meikei Ieong | HiTech | 
| Industrial Advisory Committee Vice-chair | Mukta Farooq | IBM | 
| North American Arrangement Committee Chair | Murty Polavarapu | BAE | 
| European Arrangement Committee Chair | Merlyne de Souza | The University of Sheffield | 
| European Arrangement Committee Vice-chair | Benjamin Iniguez | Universitat Rovira Virgili | 
| Region 9 Arrangement Committee Chair | Edmundo A. Gutierrez-D | INAOE | 
|   | 
| Technical Program Committee (TPC) | 
| Subcommittee: Materials | 
| Chair | Pei-Wen Li | National Yang Ming Chiao Tung University | 
| Vice-chair | Samit Ray  | Indian Institute of Technology Kharagpur | 
| Member | Saptarshi Das | The Pennsylvania State University | 
| Member | Kazuhito Matsukawa | SUMCO | 
| Member | Xiaodong Pi | Zhejiang University | 
| Member | Muhammad Mustafa Hussain | University of California, Berkley | 
| Member | C. J. Su | National Yang Ming Chiao Tung University | 
| Member | Peter Littlewood | University of Chicago | 
| Member | Lain-Jong (Lance) Li  | The University of Hong Kong | 
| Member | Milan Pesic | Applied Materials | 
| Member | Hiroyasu Yamahara | The University of Tokyo | 
| Member | Francesca Iacopi | University of Technology Sydney | 
|   | 
| Subcommittee: Process, Tools, Yield, and Manufacturing | 
| Chair | Makoto Miura | Hitachi High-Tech | 
| Vice-chair | Angelo Pinto | Qualcomm | 
| Member | Ming Li | Peking University | 
| Member | Anupam Mitra | Kioxia | 
| Member | Keiichi Nakazawa | Sony Semiconductor | 
| Member | Shawn Thomas | Applied Materials | 
| Member | Walter Schwarzenbach | Soitec | 
| Member | Yoshiki Yamamoto | Renasas | 
| Member | Huimei Zhou | IBM | 
| Member | Tomasz Brozek | PDF Solutions | 
| Member | Kim SangHyeon | Korea Advanced Institute of Science and Technology | 
| Member | Yasushi Akasaka | Tokyo Electron | 
| Member | Yao-Jen Lee | TSRI | 
| Member | Tien-Sheng Chao | National Yang Ming Chiao Tung University | 
| Member | Saurabh Lodha | Indian Institute of Technology Bombay | 
|   | 
| Subcommittee: Semiconductor Devices | 
| Chair | Jiezhi Chen | Shandong University | 
| Vice-chair | Masaharu Kobayashi | The University of Tokyo | 
| Vice-chair | Gong Xiao | National University of Singapore | 
| Member | Yuichiro Mitani | Tokyo City University | 
| Member | Kimihiko Kato | AIST | 
| Member | Kuniyuki Kakushima | Tokyo Institute of Technology | 
| Member | Runsheng Wang | Peking University | 
| Member | Bin Gao | Tsinghua University | 
| Member | Yogesh Singh Chauhan | Indian Institute of Technology, Kanpur | 
| Member | Naoto Horiguchi | imec | 
| Member | Roger Booth | Qualcomm | 
| Member | Wei Cao | Intel | 
| Member | Han Wang | TSMC | 
| Member | Miaomiao Wang | IBM | 
| Member | Wansik Hwang | Korea Aerospace University | 
| Member | Zhigang Ji | Shanghai Jiao Tong University | 
| Member | Seulki Park | Samsung | 
|   | 
| Subcommittee: Memory Technologies | 
| Chair | Shimeng Yu | Georgia Institute of Technology  | 
| Vice-chair | Tuo-Hung Hou | National Chiao Tung University | 
| Member | Hugh Barnaby | Arizona State University | 
| Member | Qiangfei Xia | University of Massachusetts at Amherst | 
| Member | Kai Ni | Rochester Institute of Technology | 
| Member | Wilman Tsai | Stanford University | 
| Member | Jianshi Tang | Tsinghua University | 
| Member | Bing Chen | Zhejiang University | 
| Member | Reika Ichihara | Kioxia  | 
| Member | Yangying Chen | Western Digital | 
| Member | Elisa Vianello | CEA-Leti | 
| Member | Jeng-Hua Wei | ITRI | 
| Member | Xinyu Bao | TSMC | 
| Member | Jiyong Woo | Kyungpook National University | 
| Member | Uwe Schroeder | NamLab | 
|   | 
| Subcommittee: Photonics, Imaging and Display | 
| Chair | Zhiyong Fan | Hong Kong University of Science and Technology | 
| Vice-chair | Guozhen Shen | Institute of Semiconductors, CAS | 
| Member | Gang Li | Hong Kong Polytechnic University | 
| Member | Kai Wang | Sun Yat-Sen University | 
| Member | Hang Zhou | Peking University | 
| Member | Chuan Wang | Washington University in St Louis | 
| Member | Qihua Xiong | Tsinghua University | 
| Member | Euan Mcleod | University of Arizona | 
| Member | Shang-Hua Yang | National Tsing Hua University | 
| Member | Hong Lu | Nanjing University | 
| Member | Tomohiro Amemiya | Tokyo Institute of Technology | 
| Member | Sarvagya Paavan Dwivedi | imec | 
| Member | Mitsuru Takenaka | The University of Tokyo | 
|   | 
| Subcommittee: Power and Energy Devices | 
| Chair | Kejun Xia | TSMC | 
| Vice-chair | Rongming Chu | Penn State University | 
| Vice-chair | Wai Tung Ng | University of Toronto | 
| Member | Moufu Kong | University of Electronic Science and Technology of China | 
| Member | Uttam Singisetti | University at Buffalo, The State University of New York | 
| Member | Yu Cao | FastPower | 
| Member | Carol Zhan | ON Semiconductor | 
| Member | Ray Hueting | University of Twente | 
| Member | Man Hoi Wong | University of Massachusetts Lowell | 
| Member | Qian Sun | Suzhou Institute of Nano-Tech and Nano-Bionics | 
| Member | Shu Yang | Zhejiang University | 
| Member | Ho-Young Cha | Hongik University | 
| Member | Wataru Saito | Kyushu University | 
| Member | Hiroshi Yano | University of Tsukuba | 
| Member | Marina Antoniou | University of Warwick | 
| Member | Wuxia Li | NXP | 
|   | 
| Subcommittee: Modeling and Simulation | 
| Chair | Paul Zhou | ADI | 
| Vice-chair | Guofu Niu | Auburn University | 
| Vice-chair | Chika Tanaka | Kioxia | 
| Member | Lan Wei | University of Waterloo | 
| Member | Sourabh Khandelwal  | Macquarie University | 
| Member | Darsen Lu | National Cheng Kung University | 
| Member | Dondee Navarro | Kioxia | 
| Member | Victor Moroz | Synopsys | 
| Member | Slobodan Mijalkovic | Silvaco | 
| Member | Elena Gnani | University of Bologna | 
| Member | Risho Koh | Renesas | 
| Member | Mansun Chan | The Hong Kong University of Science and Technology | 
| Member | Xingsheng Wang | Huazhong University of Science and Technology | 
| Member | Peng Huang | Peking University | 
| Member | Prezemyslaw Gromala | Robert Bosch GmbH | 
| Member | Harshit Agarwal  | Indian Institute of Technology, Jodhpur | 
| Member | Feng Xu | Tsinghua University | 
| Member | Brian Swahn | ADI | 
| Member | Lining Zhang | Peking University Shenzhen | 
|   | 
| Subcommittee: Reliability | 
| Chair | Zakariae Chbili  | Intel | 
| Vice-chair | Stanislav Tyaginov | imec | 
| Member | Fransesco Maria Puglisi | University of Modena  | 
| Member | Rhagavan Nagarajan | Singapore University of Technology  | 
| Member | Pragya Shrestha | National Institute of Standards and Technology | 
| Member | Kristina Young | Globalfoundries | 
| Member | Charles Larow | Intel | 
| Member | Gerhard Rzepa | GTS | 
| Member | Suzanna Regianni | University of Bologna | 
| Member | Yasuo Cho | Tohoku University | 
| Member | Koji Eriguchi | Kyoto University | 
|   | 
| Subcommittee: Packaging and Heterogeneous Integration | 
| Chair | Yasumitsu Orii | Nagase | 
| Vice-chair | Akihiro Horibe | IBM Research Tokyo | 
| Member | Masashi Nakazawa | SONY | 
| Member | Atsushi Takahashi | Nagase | 
| Member | Jian Cai | Tsinghua University | 
| Member | Shin-Puu Jeng | TSMC | 
| Member | Wei-Chung Lo | ITRI | 
| Member | Gu-Sung Kim | Kangnam University | 
| Member | Xiaowu Zhang | IME Singapore | 
| Member | Wei Keat Loh | Intel Malaysia | 
| Member | Yong Liu | ON Semiconductor | 
| Member | Tanja Braun | Fraunhofer IZM | 
|   | 
| Subcommittee: Sensor, MEMS, Bio-Electronics | 
| Chair | Xinxin Li | SIMIT CAS | 
| Vice-chair | Jiahao Zhao | Tsinghua University | 
| Vice-chair | Tian-Ling Ren | Tsinghua University | 
| Member | Zhenhua Tian | Mississippi State University | 
| Member | Hung Cao | University of California, Irvine | 
| Member | Wei Wang | Peking University | 
| Member | Hongyu Yu | The Hong Kong University of Science and Technology | 
| Member | Dan Preston | Rice University | 
| Member | Jingjing Zhao | Stanford University | 
| Member | Jun Chen | University of California, Los Angeles | 
| Member | Shuji Tanaka | Tohoku University | 
| Member | Beomjoon Kim | The University of Tokyo | 
|   | 
| Subcommittee: Flexible and Wearable Electronics | 
| Chair | Luisa Petti | Free University of Bozen-Bolzano | 
| Vice-chair | Almudena Rivadeneyra | University of Granada  | 
| Vice-chair | Feng Yan | Hong Kong Polytechnic University | 
| Member | Xiaojun Guo | Shanghai Jiao Tong University  | 
| Member | Francesca Bottacchi | FlexEnable  | 
| Member | Niels Benson | University of Duisburg-Essen | 
| Member | Radu Sporea | University of Surrey | 
| Member | Alwin Daus | RWTH Aachen University | 
| Member | Dimitra Georgiadeu | University of Southampton | 
| Member | Julio Costa | PragmatIC | 
| Member | Linrun Feng | LinkZill | 
| Member | Hendrik Faber | King Abdullah University of Science and Technology | 
| Member | Manuela Ciocca  | Free University of Bozen-Bolzano | 
| Member | Giorgio dell'Erba | FLEEP Technologies | 
| Member | Martina Aurora Angeli Costa | Free University of Bozen-Bolzano | 
| Member | Dianne Corsino Cabrejas | Nara Institute of Science and Technology | 
| Member | Akiko Ohata | High Energy Accelerator Research Organization | 
| Member | Juan Paolo Bermundo | Nara Institute of Science and Technology | 
|   | 
| Subcommittee: Nanotechnologies | 
| Chair | Stephen Goodnick | Arizona State University | 
| Vice-chair | Xinran Wang | Nanjing University | 
| Member | Mario Lanza | King Abdullah University of Science and Technology | 
| Member | Qing Tu | Texas A&M University | 
| Member | Fengqiu (Frank) Wang | Nanjing University | 
| Member | Wolfgang Porod | University of Notre Dame | 
| Member | Trevor Thornton | Arizona State University | 
| Member | Yonhua Tseng | National Cheng Kung University, | 
| Member | Yoshitaka Okada | The University of Tokyo | 
| Member | Toshifumi Irisawa | AIST | 
| Member | Kosuke Nagashio | The University of Tokyo | 
| Member | Huamin Li | University at Buffalo, The State University of New York | 
| Member | Manabu Ohtomo | Fujitsu | 
|   | 
| Subcommittee: Disruptive Technologies - IoT, AI/ML, Neuromorphic & Quantum Computing | 
| Chair | Yuchao Yang | Peking University | 
| Vice-chair | Gina Adam | George Washington University | 
| Member | Can Li | Dalian Institute of Chemical physics. Chinese Academy of Sciences | 
| Member | Xiaojian Zhu | Chinese Academy of Sciences | 
| Member | Adnan Mehonic | University College London | 
| Member | Xizhu Peng | University of Electronic Science and Technology of China | 
| Member | Shaodi Wang | WITINMEM | 
| Member | Zhichao Zack Lv | Reliance Memory | 
| Member | Bonan Yan | Peking University | 
| Member | Ying-Chen (Daphne) Chen | Northern Arizona University | 
| Member | Changhwan Choi | Hanyang University | 
| Member | Matthew W. Daniels | National Institute of Standards and Technology | 
| Member | Changjing Wan | Nanjing University | 
| Member | Takao Marukame | Toshiba |