Prof. Dr. Oliver Paul
Curriculum Vitae
| 1986 | Diploma in physics (ETH Zurich) |
| 1990 | PhD (Dr. sc. nat., ETH Zurich) |
| 1991-1992 | Post-doctoral fellow at FhG-ISE, Freiburg, Germany |
| 1992-1998 | Senior scientist and group leader at the Physical Electronics Laboratory (headed by Prof. Dr. H. Baltes), ETH Zurich; lecturer at the Department of Electrical Engineering, ETH Zurich. |
| 1998-date | Professor, Chair of Microsystem Materials, Department of Microsystems Engineering (IMTEK), the Faculty of Engineering, University of Freiburg, Germany. |
| 1999-2002 | Dean of Studies, Institute of Microsystem Technology IMTEK, University of Freiburg, Germany. |
| 2002-2004 | General Co-Chair, 17 th IEEE Conference on Microelectromechanical Systems MEMS 2004, Jan. 25-29, Maastricht, The Netherlands. |
| 2003 | Visiting professor at Ritsumeikan University, Kyoto, Japan. |
| 2005-2009 | Head of the DFG-funded Ph.D. research training program 1103 "Embedded Microsystems" |
| 2006-2008 | Director of IMTEK |
| 2006-2008 | Chairman of the examination board of the Faculty of Applied Sciences. |
| 2009 | Visiting professor at the Engineering Research Center for Wireless Integrated Microsystems (WIMS), University of Michigan, Ann Arbor, USA. |
Professional society affiliations, activities, honors
Patents, publications, presentations
Research Interests
- Microsystems for physical sensing and biomedical applications
- Materials and fabrication technologies for microsystems
- Material properties of thin films
- Microelectromechanical systems (MEMS) based on commercial IC processes
- Quantitative, physical understanding of MEMS
Former PhD Students
| Dominique Jaeggi | Bookham Switzerland AG |
| Martin von Arx | ESEC SA, Cham, Switzerland |
| Niklaus Schneeberger | Debiotech, Lausanne, Switzerland |
| Felix Mayer | Co-Founder and CEO, Sensirion AG, Stäfa, Switzerland |
| Michael Mayer | Professor, University of Waterloo, Canada |
| Volker Ziebart | Mettler-Toledo GmbH, Nänikon, Switzerland |
| Torsten Kramer | Robert Bosch GmbH, Reutlingen, Germany |
| Michael Ehmann | Stiftung Caesar, Bonn, Germany |
| Simon Armbruster | Robert Bosch GmbH, Reutlingen, Germany |
| Ulrich Wagner | Robert Bosch GmbH, Gerlingen-Schillerhöhe, Germany |
| Julian Bartholomeyczik | Northrop Grumman Litef GmbH, Freiburg, Germany |
| Michael Doelle | Silicon Microstructures, Milpitas, USA |
| Achim Trautmann | Robert Bosch GmbH, Stuttgart, Germany |
| Simon Brugger | Testo AG, Lenzkirch, Germany |
| Martin Cornils | Micronas GmbH, Freiburg, Germany |
| Jochen Held | University of Tübingen, NMI, Reutlingen, Germany |
| Sebastian Kisban | UP-MED GmbH, München, Germany |
| Ulrich Bartsch | Sensirion AG, Stäfa, Switzerland |
| Stefan Hillebrecht | University of Freiburg, IfI, Freiburg, Germany |
Research Activities
| 1998-date | Research in process technology,
materials preparation and characterization for MEMS based on silicon
technology and related technologies; silicon based MEMS devices and
systems. |
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| 1996-1998 | Swiss Priority Program MINAST (Micro and Nano System Technology) |
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| 1992-1998 | Microsensors, Microsystems, Silicon Technology |
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| 1991-1992 | Silicon Solar Cell Physics and Technology |
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| 1987-1991 | Surface Physics, Magnetism |
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| 1986 | Neutron Scattering, Magnetism |
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Professional society affiliations, activities, honors
| Conference: | 2009: Mikrosystemtechnik-Kongress, Transducers, Eurosensors |
| Program: | 2008: Eurosensors, IEEE Sensors, Smart Systems Integration |
| Comittees: | 2007: IEEE Sensors, Smart Systems Integration |
| 2004: IEEE MEMS 2004 Conference General Co-Chair | |
| 2002-2006: IEEE MEMS Conference International Steering Committee | |
| 1998-2003: IEEE MEMS Conference Technical Program Committee | |
| 1996-1999: SPIE Conferences on Micromachined Devices and Components | |
| Editorial: | 2007-date: Transactions on Electrical and Electronic Engineering (IEE Japan) |
| Board: | 2005-date: Journal Micromechanics and Microengineering (IOP) |
| 1995-date: Sensors and Actuators A (Elsevier) | |
| Membership: | Institute of Electrical and Electronic Engineers IEEE |
| Journal: | Sensors and Materials |
| Reviewing: | IEEE Sensor Journal |
| IEEE Transactions on Electron Devices | |
| IEEE Electron Device Letters | |
| IEEE/ASME Journal of Microelectromechanical Systems | |
| Journal of Applied Physics | |
| Journal of Electroceramics | |
| Journal of Micromechanics and Microengineering | |
| Microsystem Technologies | |
| Nanotechnology | |
| Sensors and Actuators A | |
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Thermochimica Acta |
| Awards: | IEEE Sensors 2009: with PhD student M. Baumann, 2nd best poster award |
| InterPack 2009: with PhD student Benjamin Lemke, best poster award of session | |
| Eurosensors 2008: with PhD student P. Gieschke, 3rd best poster award | |
| 2007: Arnold-Biber-Award of The German Orthodontic Society, with PD Dr. B. Lapatki | |
| IEEE Sensor 2003: with PhD student J. Bartholomeyczik receives Samsung Award for 2nd best student paper | |
| IEEE ICMTS 1999, best paper award | |
| IMAPS 1998, best paper of session award | |
| IEDM 1997, PhD student F. Mayer received IEEE R. A. Haken Award | |
| IEEE ICMTS 1996, best paper award | |
| Micromechanics Europe 1996 Workshop, best poster award | |
| Polya Award of ETH Zurich for Best Physics Diploma examination result, 1986 | |
| Co-Founder: | 1998-date: Sensirion AG, Stäfa, Switzerland, with 185+ employees |
Teaching
| 2008-date |
CMOS-Integrated Microsystems |
University of Freiburg |
| 2008-date | Semiconductors | University of Freiburg |
| 2006-date | Solid State Physics for MEMS Engineers | University of Freiburg |
| 2005-date | Advanced Silicon Technologies,
with Dr. P. Ruther and Dr. J. Gaspar |
University of Freiburg |
| 2004-date | Quantum mechanics for micro and nano engineers | University of Freiburg |
| 2002-2007 | Integrated Microsystems | University of Freiburg |
| 2001 | Reactive Ion Etching, with Dr. P. Ruther | University of Freiburg |
| 1999-date | MEMS Material and Device Characterization, with Dr. P. Ruther and Dr. J. Gaspar | University of Freiburg |
| 1999-2005 | Microsystem Technology Lab Class, with Dr. P. Ruther | University of Freiburg |
| 1998-2006 | MEMS Materials I | University of Freiburg |
| 1998-date | Fundamental Materials Science | University of Freiburg |
| 1996 | Physical Electronics | ETH Zürich |
| 1995 | Microsystem Technology | Brugg Technical College Postgraduate Program, Brugg, Switzerland |
| 1995 | Process Integration |
NEXUS Course of Micromachining, Bremen, Germany |
| 1993-1998 | Microsensors | ETH Zürich |
| 1992-1998 | Silicon Technology | ETH Zürich |
Languages
| Fluent: | German, English, French, Swiss German |
| Basic knowledge: |
Italian, Spanish, Japanese |
Patents, publications, presentations
| 3 patents |
| Over 280 publications in scientific journals, conference proceedings, books |
| Over 100 oral scientific presentations |